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Precision inspection equipment

Wafer-level vision inspection systems ensure the highest quality and reliability of semiconductor ICs and enable manufacturers to continuously improve yields. These systems employ precision optics and analog circuitry to identify the smallest defects during wafer fabrication. As lithographic dimensions continue to shrink with advances in the latest process nodes, manufacturers require the highest defect sensitivities. This places stress on the analog and mixed-signal circuitry in vision systems that require considerable noise filtering. As power needs increase, filters are becoming too large to be accommodated by these systems. A new approach to power delivery is required to keep pace with advances in semiconductor wafer fabrication.

Precision inspection equipment

The power delivery network

Reducing noise in sensitive wafer inspection systems starts with a reconsideration of the PDN. Moving the system from the outdated 12V bus to a more power efficient 48V resolves efficiency and thermal issues, and is a critical first step. However, to fully achieve wafer inspection requirements, it is necessary to employ high density power modules with topologies that are inherently low-noise. Vicor BCM fixed-ratio converters with sine amplitude conversion (SAC) topology mitigate noise and allow for manufacturers to use less filtering. As an added bonus, the compact size and low profile also simplify thermal management that, in turn, simplifies the mechanical design of inspection systems.

Power Delivery Network for
BCM bus converters

BCM bus converter modules

Input: 800 – 48V

Output: 2.4 – 55.0V

Power: Up to 150A

Efficiency: Up to 98%

As small as 22.0 x 16.5 x 6.7mm  

DCM DC-DC converters

DCM DC-DC converters

Input: 9 – 420V

Output: 3.3, 5, 12, 13.8, 15, 24, 28, 36, 48V

Power: Up to 1300W

Efficiency: Up to 96%

As small as 24.8 x 22.8 x 7.2mm

ZVS buck family page

ZVS buck regulators

Inputs: 12V (8 – 18V), 24V (8 – 36V), 48V (30 – 60V)

Output: 1 – 16V 

Power: Up to 22A

Peak efficiency: Up to 98%

As small as 10.0 x 10.0 x 2.5mm  

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